As benchmark carriers for semiconductor and laser equipment, nano-grade granite components cannot be shipped right after machining. All precision indicators must be verified in a controlled environment, with measurement data archived to confirm nano-level positioning performance. UNPARALLELED Group carries out comprehensive inspections inside a constant-temperature vibration-isolated metrology lab, verifying every feature from overall geometry to micro surface topography.
Flatness inspection is the primary test. Granite reference surfaces serve as geometric benchmarks. The workpiece is thermally stabilized before measurement. High-precision instruments scan multiple paths across the surface to capture topography data. For windowed or slotted substrates, secondary reference surfaces around openings are also inspected separately.
Geometric tolerance inspection covers perpendicularity, parallelism and straightness. Many granite mounts and gantries have mutually perpendicular reference faces. The relative position of side faces, vertical beams and window walls directly affects the orthogonality of motion axes. Straightness tests are applied to long rail mounting surfaces to prevent posture deviation of linear motors and air-bearing guides.
Hole pattern inspection is critical. Hole position, depth, aperture and hole-axis perpendicularity are checked for counterbores, locating holes and threaded inserts. For array holes, coordinate data is compared against drawing theory to calculate position error. Inner hole surfaces are checked for chipping and scratches.
Surface topography and roughness inspection evaluates micro surface quality. Flatness describes overall undulation, while roughness characterizes micro texture. Even with good flatness, tiny grinding marks will compromise fitting stability. Optical scanners capture micro-profile data to confirm nano-grade surface quality.
Full dimensional verification checks length, width, thickness, window and slot dimensions. For large heavy granite parts, supports are arranged to simulate customer installation conditions, so self-weight deflection will not distort measured values.
Visual defect inspection is carried out under bright dust-free lighting. Inspectors check reference planes, window edges and hole rims for chipping, cracks and scratches. Tiny cracks may propagate under continuous vibration and must be eliminated before shipment.
All measurement data is compiled into traceable inspection reports. UNPARALLELED's metrology lab supports CNAS traceable testing inside temperature-controlled anti-vibration space. Only components passing all checks will go through cleaning, protection and packaging for delivery.
Granite precision inspection is a systematic validation covering dimensions, geometric tolerances, hole arrays, micro-surface and visual defects. Multi-item testing eliminates risks and ensures the components fit directly into precision laser and semiconductor equipment.