Air Bearing Stage

Air Bearing Stage

This is not a standard table or plate — it’s a custom-engineered foundation designed for high-precision, large-format motion systems such as those used in semiconductor manufacturing, aerospace assembly, or large-scale optical alignment.
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UNPARALLELED LTD is one of the leading manufacturers and suppliers of air bearing stage in China. With abundant experience, we warmly welcome you to buy advanced air bearing stage made in China here from our factory. We also accept custom orders.

 

Product Description

Engineering Stability at Scale: The UNPARALLELED® Large Precision Granite Motion Base

When you're building systems that measure microns across meters, every component must be engineered to resist drift, vibration, and thermal distortion. That's why global leaders in semiconductor fabrication, aerospace, and high-energy physics trust UNPARALLELED® - the world's most advanced manufacturer of precision granite structures - to deliver the largest, most stable, and most accurate motion bases available today.

Our Large Precision Granite Motion Base with Integrated Linear Guide Rail isn't just a platform - it's the backbone of high-performance automation. Machined from our proprietary ultra-dense black granite (≈3100 kg/m³), this component combines exceptional rigidity, near-zero thermal expansion, and superior damping properties - all while supporting precise, repeatable linear motion via factory-installed, high-grade guide rails.

We don't manufacture off-the-shelf parts. We engineer system-level solutions that scale with your vision - because when your process demands sub-micron accuracy over meters, compromise is not an option.

quality control

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Technical Specifications

Parameter Specification
Base Material UNPARALLELED® Black Granite (Density: ~3100 kg/m³)
Dimensions (Typical) Up to 4000mm × 800mm × 500mm (Customizable)
Surface Flatness ±0.5 μm per meter (Grade 00 per DIN 876)
Straightness Accuracy < 1.5 μm over full length
Thermal Expansion Coefficient < 0.5 × 10⁻⁶ /°C
Load Capacity Up to 1000 kg (depending on configuration)
Linear Guide Rails Dual parallel rails (e.g., THK, HIWIN, NSK compatible), hardened steel, ground precision class
Integration Method Flush-mounted with epoxy + mechanical anchoring; stress-relieved bonding
Mounting Holes M8/M10 threaded holes, customizable pattern
Support Structure Triple-pod leg design for enhanced rigidity and load distribution
Certifications ISO 9001, ISO 14001, CE, calibration traceable to NIST/PTB
Calibration Laser interferometry testing included

All units undergo full dimensional verification and come with detailed certification reports.

Why Choose This Large Granite Motion Base?

  • Unmatched Structural Integrity: The triple-pod design ensures minimal deflection under heavy loads, making it ideal for large gantry systems or multi-axis stages.
  • Zero Thermal Drift: With a near-zero CTE, this base maintains dimensional accuracy across temperature fluctuations - critical in cleanroom environments.
  • Integrated Motion Readiness: Pre-aligned, flush-mounted rails eliminate installation errors and reduce setup time.
  • Superior Vibration Damping: Granite absorbs mechanical vibrations up to 5–10× better than cast iron or steel, improving measurement repeatability.
  • Cleanroom & EMI-Compatible: Non-porous, non-conductive, and non-magnetic - perfect for semiconductor, medical, and aerospace applications.
  • Scalable Design: From 3-meter benches to 6-meter systems, we customize every dimension, rail type, and interface.

Real-World Applications

Used in:
✅ Semiconductor wafer inspection and lithography systems
✅ Aerospace composite curing and alignment platforms
✅ High-resolution industrial CT scanners
✅ Large-format optical interferometers and lidar arrays
✅ Automated pick-and-place systems for heavy components

Client Benefits:

  • Eliminates measurement errors caused by base deformation or thermal expansion
  • Reduces recalibration frequency due to long-term dimensional stability
  • Enables faster integration with pre-aligned rails and standardized mounting
  • Supports multi-axis motion when paired with cross slides or rotary stages
  • Future-proof scalability through modular design and customization

certificates

202208091040467d082c4aa1244741a6cbe9cf34845264

FAQ

Q: What is the maximum size you can produce?
A: We have successfully manufactured 6-meter-long granite bases. Our production capacity supports lengths up to 6000mm, depending on transportation logistics.

Q: Can I specify the rail brand or model?
A: Yes. We integrate rails from THK, HIWIN, NSK, Bosch Rexroth, or your preferred supplier - or supply the granite base only for your own rail installation.

Q: How is the rail attached to the granite?
A: Using a dual-method approach: high-strength, low-shrinkage epoxy + mechanical dowel pins or slots. This prevents delamination under thermal cycling or shock loads.

Q: Is this suitable for vertical or overhead mounting?
A: Yes - with proper reinforcement and mounting design. Our engineering team can provide FEA analysis upon request.

Q: Do you offer surface scraping or oil grooves?
A: While granite doesn't require oil lubrication, we can add custom channels, recesses, or sensor pockets as needed for your application.

Why Partner with UNPARALLELED®?

Because precision isn't accidental - it's engineered.
With 20+ international patents, 4 advanced NanTec grinding centers, and collaborations with institutions like Tsinghua University and KTH Royal Institute of Technology, we don't just meet standards - we set them.
Our clients - including Samsung, GE Healthcare, and leading European automation integrators - rely on us because when failure is not an option, neither is compromise.

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