UNPARALLELED LTD is one of the leading manufacturers and suppliers of granite substrate with window in China. With abundant experience, we warmly welcome you to buy advanced granite substrate with window made in China here from our factory. We also accept custom orders.
Product overview
The granite baseplate with window is fabricated from high-density black precision granite through ultra-precision lapping processes, with customized light-transmitting windows pre-machined on the plate. Boasting a density of 3100kg/m³ and a low thermal expansion coefficient, it delivers outstanding dimensional stability and inherent damping and vibration suppression performance. Free of internal stress and resistant to deformation, its working surface achieves nanometer-level flatness. Integrated machining including window cutouts, counterbores and threaded holes can be completed according to equipment drawings, suitable for semiconductor precision equipment such as optical inspection systems, laser processing machines and probe stations. Featuring chemically inert material and ultra-low porosity, the baseplate hardly sheds particles and meets the requirements of cleanroom environments. Certified by ISO integrated management systems, CE and CNAS, every product is inspected with a full suite of imported metrology instruments before delivery. Widely supplied to research institutes and world-renowned equipment manufacturers, it can be assembled with air-bearing guideways and optical assemblies to form a stable reference carrier for transmitted light paths.
| Base Material | High-density black precision granite |
| Density | 3100 kg/m³ |
| Internal Stress | Fully aged, nearly stress-free |
| Material Properties | Chemically inert, low porosity, non-particle-shedding |
| Applicable Environment | Semiconductor cleanrooms, constant temperature & humidity conditions |
Quality Control
Core Advantages
Excellent dimensional stability with minimal thermal deformation; benchmarks remain drift-free over long-term operation.
Natural high-damping property to effectively absorb medium and high-frequency micro-vibrations and protect transmitted optical paths.
High-density and low-porosity material, hardly releasing particles, suitable for high-grade semiconductor cleanrooms.
Integrated precision machining available for window cutouts, counterbores, threaded holes to meet equipment integration requirements.
Fully aged to eliminate internal stress, creep-free, no permanent deformation under long-term loading.
Nanometer-level flatness on working surface to guarantee repeat positioning accuracy for optical imaging and laser processing.
Chemically stable, resistant to common cleanroom detergents; surface resists corrosion and abrasion.
Full-set metrology inspection, certified by ISO integrated management systems, CE and CNAS with traceable indicators.
Maintenance & Protection
The granite baseplate with window features stable material properties. It hardly requires complicated maintenance under normal working conditions. Daily protection is critical to retain its nanometer-level precision for a long time. During handling and installation, soft slings and protective pads shall be adopted to avoid collision and impact on working surfaces and window edges, preventing chipping and microcracks. Workpieces or tooling must not be dragged directly on the baseplate surface to avert scratches on the precision lapped surface. In semiconductor cleanroom environments, use dust-free soft cloths with special neutral cleaning agents for gentle wiping of working surfaces and window zones. Strong acid or alkaline solvents are forbidden to prevent surface damage. Do not apply excessive pressure during cleaning to avoid substrate deformation caused by localized stress. Avoid prolonged local overload exceeding the design limit during operation. Keep workshop temperature and humidity within the product's designed range to reduce reversible deformation induced by temperature gradients. Hard metal parts shall not be placed directly on the working surface of the baseplate. Matching gaskets should be used for component installation. Tighten screws step by step evenly with recommended torque to prevent localized stress concentration. Regularly inspect the area around windows, threaded holes and counterbores to ensure no debris or dust accumulation. Clean minor stains promptly. In case of structural damage such as chipping or cracks, stop operation and contact the manufacturer for assessment. Do not perform grinding repairs by yourself, otherwise the reference precision will be compromised. For long-term storage, place the baseplate in a constant-temperature dry environment. Cover the working surface with dust-proof protective film and rest it on a flat support platform to avoid stress from single-point suspension.
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