UNPARALLELED LTD is one of the leading manufacturers and suppliers of granite xy base plate in China. With abundant experience, we warmly welcome you to buy advanced granite xy base plate made in China here from our factory. We also accept custom orders.
Product overview
UNPARALLELED® Granite XY Base Plate serves as the integrated reference carrier for XY linear motor stages, AOI and semiconductor precision equipment. Made of high-density black granite, it undergoes long aging for stress relief and nanometer-level ultra-precision lapping. Featuring high rigidity, high damping and low thermal expansion, it suppresses micro-vibration and thermal drift to keep stable coordinates during XY stage movement. Custom mounting holes and air-bearing surfaces are available, and large monolithic pieces can be processed. Inspected by laser interferometers, Mahr dial gauges and other instruments, it achieves nanoscale flatness to meet mass-production requirements of precision optical and semiconductor inspection equipment.
| Material | Black precision granite |
| Density | 3100kg/m³ |
| Machining accuracy | Nanometer-level flatness, positioning accuracy up to 1μm |
| Properties | High damping for vibration reduction, low water absorption, high hardness & wear resistance |
| Machining type | Monolithic one-piece processing, custom dimensions available |
Quality Control
Core Advantages
Low thermal deformation: Thermal expansion coefficient ≤3e-6/℃. Minimal benchmark drift under temperature fluctuation to maintain long-term coordinate stability of XY stages.
High damping & vibration reduction: Natural high-damping property effectively absorbs multi-source micro-vibration and reduces errors in imaging and positioning.
High rigidity & wear resistance: Density of 3100kg/m³, high hardness and low water absorption. The reference surface resists wear under long-term load.
Monolithic forming: Available in one-piece machining without splicing seams, eliminating vibration and precision defects at joints. Custom large sizes are supported.
Ultra-high lapping precision: Nanometer-level flatness. Air-bearing surfaces, positioning grooves and threaded holes can be custom-machined for linear motor stage assembly.
Complete metrology & QC: Inspected by laser interferometers, Mahr dial gauges and WYLER electronic levels with traceable measurements. Certified with ISO, CE and CNAS.
Maintenance & Protection
Keep the working surface clean and dry. Wipe gently with dust-free soft cloth and anhydrous ethanol. Do not scrape the reference surface with hard tools to avoid scratches.
Avoid direct heavy impact on the substrate. Granite is relatively brittle; impact may cause chipping and damage benchmark precision.
Stabilize ambient temperature and humidity, avoid sharp temperature changes to minimize micro-deformation induced by thermal stress and preserve long-term flatness.
Use flexible supports during handling with evenly distributed force. Lifting at a single point is forbidden to prevent invisible cracks inside the substrate.
Carry out regular visual and precision re-inspection. If collision damage occurs, return to factory for assessment. The reference surface can be re-lapped for repair when necessary. On-site self-grinding is not recommended.
For long-term storage, cover with dust-proof film and place in a constant-temperature, shock-free area away from vibration sources and corrosive substances.
Services
Products Description
Can we customize the dimensions and mounting holes of granite XY base plate? Yes. Monolithic one-piece custom machining is available. Threaded holes, positioning grooves and air-bearing mounting surfaces can be fabricated according to the layout of customers' XY linear motor stages.
What flatness grade can the base plate achieve? After ultra-precision lapping, the flatness reaches nanometer level, and positioning accuracy at key positions can be up to 1μm. Tested by complete metrology instruments with traceable measurement values.
Will the granite base deform obviously with temperature change? No. Its thermal expansion coefficient ≤3e-6/℃. Benchmark drift caused by temperature fluctuation is minimal, suitable for long continuous operation of AOI and semiconductor equipment.
How is its vibration suppression performance? Granite features natural high damping. It absorbs multi-source micro-vibration and reduces vibration transmission generated by XY stage movement to ensure stable imaging and positioning.
Can chipping or scratches on the base be repaired? Minor damage can be assessed and re-lapped at our factory. Severe edge chipping is irreparable. On-site self-grinding is not recommended.
Are relevant certificates available for delivery? ISO three-system certificates, CE certificates and CNAS test reports can be provided with complete test records to meet acceptance requirements for export of high-end equipment.
Certificates
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