The core competitiveness of precision semiconductor manufacturing stems from the ultimate stability of equipment substrates. In high-end processes such as chip packaging, micro-nano inspection, laser etching and wafer probing, even nanoscale micro-deformation, vibration offset and precision drift will directly lead to lower product yield and deviation of inspection data. As the core motion-carrying base of semiconductor automated equipment, the nano-precision granite XY stage has become an indispensable core basic component for high-end semiconductor equipment, thanks to the superior physical properties of natural stone and ultra-precision machining technology.
UNPARALLELED has long been engaged in the R&D and production of ultra-precision structural parts. Focusing on the core demands of high precision, high stability and high repeatability in the semiconductor industry, we develop and customize granite XY motion stages exclusively for semiconductors. We resolve industry pain points of precision attenuation, operation jitter and poor environmental adaptability of precision equipment starting from the substrate, delivering core precision guarantee for ultra-precision semiconductor processing and inspection.
Stable precision starts with selected exclusive base materials. To cut costs, most ordinary stages on the market adopt loose, uneven-density common stone as a substitute for precision granite. Long-term service will easily trigger problems including deformation caused by moisture, powder wear and thermal expansion offset, which are completely incompatible with the dust-free precision working conditions of semiconductors.
Our UNPARALLELED semiconductor-grade XY stage exclusively adopts brand-customized black granite base material. After deep ore selection and natural aging stabilization treatment, the material features uniform density, compact structure, no cracks and no pores. Compared with ordinary stone and European & American granite of the same type, this base material boasts a lower coefficient of thermal expansion, higher rigidity and vibration resistance, along with corrosion resistance, anti-magnetization and anti-deformation properties.
Under the working conditions of 24-hour continuous operation and alternating temperature & humidity in semiconductor workshops, it can continuously absorb micro-vibrations generated by high-speed equipment operation, eliminate dynamic precision offset and maintain stable precision without attenuation over long-term use, perfectly meeting the stringent substrate requirements for nano-scale micro-processing in semiconductors.
Our exclusive ultra-precision machining system delivers semiconductor-grade nanometer precision. Unlike extensive production for ordinary stone processing, we have built an exclusive precision machining system for semiconductor XY motion stages, fully complying with ultra-precision industrial manufacturing logic. Supported by mature ultra-large precision grinding and CNC machining processes, we can form large-size, integrated, joint-free granite stages, avoiding stress deformation and precision errors brought by spliced structures.
In the precision finishing process, high-end precision grinding equipment is matched with refined graded processing procedures, progressing step by step from rough grinding, fine grinding to nano-scale super-finishing, effectively correcting errors of flatness, straightness and parallelism. The overall precision and motion smoothness of the stage reach the top standards of the semiconductor industry. We support customized integration of extra-large specifications, adapting to non-standard customization demands for full-line large semiconductor equipment and high-precision inspection equipment, balancing structural stability and consistent motion precision of equipment.
Dust-free, constant-temperature & constant-humidity precision processes adapt to stringent semiconductor working condition standards. Semiconductor equipment imposes extremely strict requirements on the production and assembly environment of substrates; dust, temperature differences and micro-vibrations will directly destroy nanoscale precision. We have specially built semiconductor-grade dust-free production and assembly space with constant temperature and humidity. Professional shock-proof structures, silent operation and maintenance systems as well as dust purification control are adopted to build a stable, clean and interference-free precision production environment.
Multiple shock-proof and vibration-isolation designs are applied in the workshop to isolate ground vibration, equipment resonance and external environmental interference, ensuring stable precision in the whole process of stage grinding, calibration and assembly. Meanwhile, drawing on decades of ultra-precision manual lapping craftsmanship combined with the advantages of mechanical precision grinding, we achieve nanoscale flatness and micron-level dimensional accuracy on the stage surface, with uniform motion track and balanced load bearing capacity. It can meet the application demands of high-end precision processes including femtosecond laser processing, optical image inspection, precise semiconductor alignment and micron-scale drilling.
Full-dimensional precision metrology and calibration guarantee compliant and traceable precision. The core value of ultra-precision products lies in the authenticity, stability and controllability of every set of precision data. We have established an international, standardized metrology and inspection system, fully benchmarking mainstream global precision industry standards and covering metrology specifications of multiple countries. All products undergo multi-dimensional precision inspection before delivery, covering a full set of inspection items including flatness, straightness, perpendicularity, parallelism, motion repeatability, vibration resistance and temperature & humidity adaptability.
All complete sets of precision measuring instruments are calibrated by authoritative institutions on a regular basis. All precision data can be traced, and compliant inspection reports can be issued. We eliminate industry chaos such as falsely marked precision and inaccurate parameters, ensuring that every granite XY stage delivered to customers features stable precision, qualified performance and compatibility with supporting standards for export of global high-end equipment. 
Full-qualified brand strength builds a trusted precision benchmark of the industry. As a benchmark enterprise in ultra-precision stone structural parts, UNPARALLELED builds all-dimensional brand advantages with stringent quality control systems, standardized production management and integrity-based business philosophy. The enterprise holds a full range of internationally authoritative system certifications and independent overseas intellectual property rights. Product quality, production safety and environmental protection standards all reach world-class levels.
We always stay true to the original aspiration of the precision industry, controlling every production procedure with extremely rigorous quality control concepts, and firmly resist bad industry practices including substituting inferior materials for high-quality ones, falsely marking parameters and concealing product defects. From raw material selection, precision machining and dust-free assembly to precision inspection and delivery, the whole process is controlled by standardized management. We provide high-quality, highly stable and cost-effective precision substrate solutions for customers worldwide.
Relying on stable and reliable product performance and international service capacity, our nano-precision granite XY stages have been widely applied in numerous high-end precision fields including semiconductors, precision laser equipment, optical inspection, new energy precision manufacturing and high-end metrology research. The products are widely matched with global leading equipment manufacturers, scientific research & metrology institutes and Fortune 500 manufacturers, adapting to core equipment including various semiconductor XY motion modules, linear motor stages, precision inspection bases and laser processing substrates.
Supported by mature foreign trade delivery systems and efficient logistics support, we can rapidly respond to standardized and non-standard customized demands of global customers. We continuously provide granite precision motion stages featuring high stability, long service life and high precision for the global ultra-precision semiconductor industry, helping the high-end precision manufacturing industry improve quality and efficiency.